Inspection in semiconductors and Agentic Control
- LecturerDr. Chao-Wei Chen (ASML)
Host: Jen-Chun Lin - Time2026-06-02 (Tue.) 14:00 ~ 16:00
- LocationAuditorium 106 at IIS new Building
Abstract
Semiconductor defect inspection aims to maximize the throughput of high-resolution Scanning Electron Microscopy (SEM). However, increasingly complex system designs demand meticulous operation and introduce significant user inconvenience. To address this, agentic system control combined with a Command Line Interface (CLI) emerges as a promising paradigm for next-generation control interfaces.